Microtechnology/Microelectromechanical Systems (MEMS)

ApplicationsEdit

ResonatorsEdit

Strain GaugesEdit

Pressure SensorsEdit

AFM cantileversEdit

Acceleration DetectorsEdit

Optical Beam ControlEdit

RF MEMSEdit

Reliability design rulesEdit

Sandia has published a set of "reliability design rules" for MEMS devices intended to avoid failure modes experienced in early MEMS device tests. The most common failure mechanism was wear of the rubbing surfaces. [1]


ReferencesEdit

See also notes on editing this book about how to add references Microtechnology/About#How to Contribute.

  1. Danelle M. Tanner et. al. "MEMS Reliability: Infrastructure, Test Structures, Experiments, and Failure Modes". Sandia. 2000.