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Microtechnology/Microelectromechanical Systems (MEMS)

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Applications

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Resonators

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Strain Gauges

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Pressure Sensors

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AFM cantilevers

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Acceleration Detectors

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Optical Beam Control

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RF MEMS

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Reliability design rules

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Sandia has published a set of "reliability design rules" for MEMS devices intended to avoid failure modes experienced in early MEMS device tests. The most common failure mechanism was wear of the rubbing surfaces. [1]


References

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See also notes on editing this book about how to add references Microtechnology/About#How to Contribute.

  1. ↑ Danelle M. Tanner et. al. "MEMS Reliability: Infrastructure, Test Structures, Experiments, and Failure Modes". Sandia. 2000.
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