Microtechnology/Microelectromechanical Systems (MEMS)
Optical Beam ControlEdit
Reliability design rulesEdit
Sandia has published a set of "reliability design rules" for MEMS devices intended to avoid failure modes experienced in early MEMS device tests. The most common failure mechanism was wear of the rubbing surfaces. 
See also notes on editing this book about how to add references Microtechnology/About#How to Contribute.
- Danelle M. Tanner et. al. "MEMS Reliability: Infrastructure, Test Structures, Experiments, and Failure Modes". Sandia. 2000.