Microtechnology/Materials
Materials edit
Overview edit
Resources with overviews of materials and their most prominent uses:
- Semiconductor materials
- Ioffe NSM data archive
- overview of microfabrication materials
- overview of microfabrication materials
- Semiconductor materials
- polymers
Overview table of microfabrication materials edit
Material | Typical use | Density [g/cm3] | Atm. Mass[g/mol] | Youngs Modulus[GPa] | Shear modulus [GPa] | El. Conductivity | Therm. Cond.[W·m−1·K−1] | Melting point[K] | Notes |
---|---|---|---|---|---|---|---|---|---|
Aluminium | Leads | 2.70 | 26.98 | 70 | 26 | 26.50 nΩ·m | 237 | 933.47 K (660.32 °C) | Add notes |
Gallium Arsenide | Light emitter | 5.3176 | 144.645 | youngs | bulk | el. | therm. | 1238°C (1511 K) | Bandgap 1.424 eV |
Gallium Nitride | Blue Light emitter | 6.1 | 83.7297 | youngs | bulk | el. | therm. | K ( °C) | Add notes |
Polysilicon | solar cells | den | amu | youngs | bulk | el. | therm. | K ( °C) | highly dependent on doping and annealing. Se detailed table in the silicon section |
Silicon | Wafers, semiconductor | 2.33 | 28.0855(3) | 47 | bulk | el. | 149 | 1687 K (1414 °C) | highly dependent on doping. Se detailed table in the silicon section |
Silicon dioxide, silica | insulator, light waveguide | den | amu | youngs | bulk | el. | therm. | K ( °C) | Add notes |
Silicon nitride | insulator | den | amu | youngs | bulk | el. | therm. | K ( °C) | Add notes |
Gold | Coating of leads | 19.3 | 196.966569 | 78 | 220 | 22.14 nΩ·m | 318 | 1337.33 K (1064.18 °C) | Add notes |
Nickel | MEMS, leads | den | amu | youngs | bulk | el. | therm. | K ( °C) | Add notes |
Platinum | Contact pads | den | amu | youngs | bulk | el. | therm. | K ( °C) | Add notes |
PMMA | 1.19 | 50.000-950.000 | youngs | bulk | el. | therm. | 378 K (105°C) glass trans. | Refractive index 1.492 | |
SU8 polymer | den | amu | youngs | bulk | el. | therm. | K ( °C) | Add notes | |
Tungsten | den | amu | youngs | bulk | el. | therm. | K ( °C) | Add notes |
This table should be merged with the above...
Mechanical | Thermal | Electrical | ||||||||
Yield Str. | Youngs. | Pois. | Density | Th. Cond. | Th. Exp. | Melting | El. cond. | α | ||
Highest Z | Material | GPa | GPa | ? | kg/m³ | (W/cmK) | (ppm/K) | K | Ωm | promille/K |
Metals | ||||||||||
34 | Al | 0.17 | 70 | 0.34 | 2698 | 2.36 | 23 | 660 | 26.5*10?? | 4.3 |
55 | Au | ? | 78-80 | 0.44-0.25 | 19281 | 3.12 | 14 | 1064 | 23-22.1*10?? | 3.7 |
66 | Cr | ? | ? | ? | 7194 | ? | ? | 1860 | ? | |
55 | Ti | 0.23 | 116 | 0.32 | 4508 | 0.2 | 8.5 | 1670 | 420*10?? | 3.8 |
80 | Pt | 0.12 | 168 | 0.38 | 21450 | 0.73 | 8.9 | 1772 | 0.0981? | 3.9 |
78 | W | 0.12 | 411 | 0.28 | 19254 | 1.8 | 4.5 | 3387 | 0.0489? | 4.8 |
65 | Ag | ? | ? | ? | ? | ? | ? | 960 | 15.9*10?? | |
56 | Fe | 12.6 | 196 | 0.29 | 7873 | 0.803 | 11.7-12 | 1540 | 89E | 6.6 |
Semimetals | ||||||||||
12 | Graphite | ? | ? | ? | 2266 | ? | ? | 3700 | 7-60E | -0.4 |
Semiconductors | ||||||||||
25 | Si intrinsic | 7 | 190 | ? | 2329 | 1.57 | 2.33 | 1410 | 2.5*10³ | |
25 | poly Si | ? | 150-170 | 0.3-0.066 | 2320 | 0.5-0.34 | 2.6 | ? | 22000 | |
25 | SiC | 21 | 700 | ? | 3200 | 3.5 | 3.3 | ? | ? | |
45 | InP | ? | 7.1E11 dyn cm-2 | ? | 4810 | 0.68 W cm-1 °C-1 | 4.60·10-6 °C-1 | 1060 | ? | |
Insulators | ||||||||||
12 | Diamond | 53 | 1035 | ? | 3500 | 20 | 1 | ? | 2.7 | |
34 | Al2O3 | 15.4 | 530 | ? | 4000 | 0.5 | 5.4 | ? | ? | |
25 | SiO2 (bulk) | 8.4 | 73 | ? | 25-2150 | 0.014 | 0.55 | ? | E-12 |
Units edit
- 1 g/cm3 = 1 kg/L = 1000 kg/m3
- g/mol = amu = Da
Applications and Uses edit
- Microprocessors
- Transistors
- Lab-on-a-chip
- MEMS
Product Life-Cycles edit
Cheap and disposable point-of-care microfluidic chips require very different materials compared to high performance microprocessors.
Environmental Considerations edit
The environmental footprint of microfabriaction is not discussed very often. If anyone has knowledge about this I hope they will contribute!!
Wafers and Substrates edit
Overview of wafer types, flats, cleaving planes etc.
References edit
See also notes on editing this book about how to add references Microtechnology/About#How to Contribute.