Processes where material is added to the wafer.
Oxidation in microtechnology refers most often to the oxidation of silicon. A layer of silicon dioxide created on the surface of a silicon wafer can be easily patterned. An SiO2 layer can be created by thermal oxidation or by deposition.
Chemical Vapor Deposition (CVD)Edit
Physical Vapor Deposition (PVD)Edit
Electron Beam Evaporation CoatingEdit
Photo and electron beam resists as well as many other polymers are often coated on wafers by spinning a volatile solution of the compund onto the wafer.
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