Microtechnology/Additional Methods

Additional Methods

edit

Apart from additiev and etching processes, there is also a range of processes to alter the materials properties and to characterize them.

Rapid Thermal Anneal (RTA)

edit

Wafer Bonding

edit

Wafer bonding

Wafer bond characterization

Electrical Connections

edit

Doping

edit

Ion Implantation

edit

Diffusion Doping

edit

Spin-on doping

edit

Packaging

edit

Interconnections

edit

Encapsulation

edit
  • Silicone oil
  • Spray-on polymers
Glues
edit
  • Epo-tek H77 is a common packaging two-component UHV compatible epoxy glue.
  • Fortafix makes a high temperature glue that should work up to around 1000 C called Rocksett.
  • Vitcas Refractories manufacturer of high temperature glue/adhesives for industrial and domestic use up to 1700 C

Ellipsometry

edit

Ellipsometers are used to measure thin film thicknesses by their optical properties (refractive index and reflectivity/absorbance).

4 Point Measurements

edit

The four-point probe technique can be used to measure the conductivity of thin films. For improved measurements micro four-point probes can be used. Capres has an application note about micro four-point probes.

Atomic Force Microscopy

edit

The Atomic force microscope (AFM) is mainly used to measure the topography of a surface, such as the roughness.

Scanning Electron Microscopy

edit

JEOL has a good guide to SEM image interpretation

Optical Microscopy

edit

Theres a good introduction to optical microscopy from Zeiss.

Vacuum Equipment

edit

References

edit

See also notes on editing this book about how to add references Microtechnology/About#How to Contribute.