Microtechnology/Additional Methods
Additional Methods edit
Apart from additiev and etching processes, there is also a range of processes to alter the materials properties and to characterize them.
Rapid Thermal Anneal (RTA) edit
Wafer Bonding edit
Electrical Connections edit
Doping edit
Ion Implantation edit
Diffusion Doping edit
Spin-on doping edit
Packaging edit
Interconnections edit
- Wire bonding
- Flip chip bonding
- Wedge bonding
- Using ZIF sockets
Encapsulation edit
- Silicone oil
- Spray-on polymers
Glues edit
- Epo-tek H77 is a common packaging two-component UHV compatible epoxy glue.
- Fortafix makes a high temperature glue that should work up to around 1000 C called Rocksett.
- Vitcas Refractories manufacturer of high temperature glue/adhesives for industrial and domestic use up to 1700 C
Ellipsometry edit
Ellipsometers are used to measure thin film thicknesses by their optical properties (refractive index and reflectivity/absorbance).
4 Point Measurements edit
The four-point probe technique can be used to measure the conductivity of thin films. For improved measurements micro four-point probes can be used. Capres has an application note about micro four-point probes.
Atomic Force Microscopy edit
The Atomic force microscope (AFM) is mainly used to measure the topography of a surface, such as the roughness.
Scanning Electron Microscopy edit
JEOL has a good guide to SEM image interpretation
Optical Microscopy edit
Theres a good introduction to optical microscopy from Zeiss.
Vacuum Equipment edit
- mass flow controllers (MFC) Gas conversion factors and formulas for calculating them
References edit
See also notes on editing this book about how to add references Microtechnology/About#How to Contribute.