Summary

Figure Caption: The electron range increases with beam energy. The internal structure of the EEBD deposits can be examined at high electron beam energies in SEM. At 5 kV with shallow penetration depth, the surface of the tips is clearly visible while at higher energies a core of more dense material becomes increasingly visible. At 100 keV and above, TEM images can achieve atomic resolution where the lattice planes in nanocrystals such as the gold nanocrystal in (c). The gold crystal is embedded in amorphous carbon with no clear lattice pattern.

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