Summary

• Figure Caption: Energetic ions sputter material off the target which diffuse through the plasma towards the substrate where it is deposited. There is no strong plasma glow around the cathode since it takes a certain distance for the plasma to be generated by electron avalanches started by a few secondary electrons from the sputtering process.

• This illustration was made for the Opensource Handbook of Nanoscience and Nanotechnology

• Please acknowledge the Opensource Handbook of Nanoscience and Nanotechnology if you use this illustration!

• The image also appears on the Commons/nanotechnology page

• Illustration by Kristian Molhave - contact me if you have suggestions/corrections to the figure, or would like the original figure.

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